Hallo Aniruddh,
I deposit Ag on expposed and PEB'd, but undeveloped SU-8 structures by
thermal evaporation.
For evaporation of Ag you need relatively low temperatures (below 1000
deg C), so
the unexposed SU-8 is not exposed during the deposition. We deposit
layers up to 2 micrometers.
For subsequent temperature steps we avoid temperatures higher than 60
deg C to avoid wrinkling of the
SU-8 (and the metal layer) in the unexposed areas, as long as the
unexposed SU-8 is not removed by developing..
Hopefully this will help you
Best regarde
Peter Svasek
--
Vienna University of Technology
Institute of Sensor and Actuator Systems