Dear MEMS community:
Could any of you give me some suggestion on how to improve the adhesion
between Ag and Si? I tried a thin layer of Cr or Ti by PVD, but it did
not really work, cause the Ag layer peeled off easily when i did some
electrochemical experiment. Could you give me some detailed information
or parameters, if you have the corresponding experiences. Thanks in
advance!
Best Regards
Xuemei Wang