Hi, Giuliano

Au/Cr is the most used mask for deep etching quartz
and glass, and so on.Cr is used for improving the
adhesion between Au and substrate.

Another point is if the wafer was cleaned completely.

Good luck

Liang


--- Giuliano Gregori
写道:

> Hello,
>
> I'm trying to deposit a 0.5 micron layer of
> titanium/gold on a portion
> of a PMGI mesa, but after the lift-off there are no
> metals left.
> I use titanium only to improve the adhesion between
> metal and resin.
> Note that the PMGI is previously baked at 230 °C
> for 5 minuts and
> reflowed at 300 °C for 7 minuts.
> I wonder whether anybody has an idea how I could
> increase the adhesion
> between PMGI and metals.