Dear riyaz,

As I also are working with SU-8 in the thickness range of 10 upto 200µm,
I'm very interested in the paper of exposure optimzation.

Thanks in advance.

Regards,
Peter Kuijpers
Philips Applied Technologies/ EP&TF

--- original message ---
Hai,

    The pictures obviously show that it has been overexposed.
I would suggest 30sec is more than enough for 20um...
Make sure you are using Filter to remove lower wavelength's, because at
lower wavelength's, SU 8 will obsorb UV light and its gives some
unexpected results.

If you want a paper regarding exposure optimzation, mail me I will send
you as Attachment.

Regards,

Riyaz Pasha Shaik