adhesion layer between Cr and porous low-K materail
xiaodong wang
2005-10-20
Hi, All,
When I deposit 110 nm Cr to porous low-K(170nm thick
SiCOH) material by E-Beam evaporation, Cr layer was
cracked due to stress.
I wonder if there is adhesion promoter which can help
reduce the stress and achieve no crack in Cr film.
Does anyone has the experience with this?
Thanks in advance.