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MEMSnet Home: MEMS-Talk: Thinning SU-8 2002
Thinning SU-8 2002
2005-10-31
[email protected]
2005-11-01
Robert Black
Thinning SU-8 2002
[email protected]
2005-10-31
Hello,

I was wandering if anyone has any experience in thinning SU-8 2000.  I have SU-8
2002 and the SU-8 2000 thinner.  I would like to be able to spin-on a 100 nm or
thinner layer of SU-8, but I don't know if this is even possible.  If anyone has
any advice on this or knows how thin I could possibly make a layer of SU-8, it
would be greatly appreciated.  Thanks.

Mark E. Curtis
Graduate Research Assistant
University of Oklahoma
Dept. of Physics and Astronomy

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