Can I deposit a DBR on the vertical wall to enhance the
reflectivity?
刘恒
2005-11-11
Hi,everyone
I am trying to fabricate a square vertical cavity.First ,using the DRIE process
to etch the Si(100) plan(form a square vertical wall cavity),then using EPW to
polish the vertical cavity.My quesion is that can I deposit a DBR on the
vertical wall to enhance the reflectivity.
Thanks a lot for your help!