Hi Sokwon,
I got photodefinable PDMS from Dow a couple months ago and they provided me
with the processing instructions. I suggest you just contact the manufacturer
of your PDMS photoresist and they should be able to give you the appropriate
instructions.
good luck,
Joe Grogan
Quoting sokwon Paik :
> Hi!
>
> Does anybody know the recipe for the PDMS for photoresist?
>
> I want to coat around 2 micro meter and then do the UV exposure.
>
> Please reply me if you know anything about this.
>