Hi Roger Brennan,
you can try HF in an ultra sonic bath, I hope your device can stand it
good luck, Carel Heerkens
Roger Brennan wrote:
>Concentrated HF is the only etchant I know that removes silicon nitride
>without much damage to silicon. However conc HF is much too slow. Is there
>an etchant that removes nitride quickly but does not harm silicon?
>
>Thank you in advance.
>
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