We just got the EBEAM system with 6 pockets, 10KV, 15KW.
For Al and Au (separate) thin film deposition, does anyone have some
guideline for me to follow?
things like what kind of crucible liner? ramp up/down time? How do you tell
the Al pellets have melted?
How fast can you ramp up for fast evapoaration?
Is there some reference that we can lookup for different material that we
can use as guideline to establish our process?
We will do non-conductive(sublime) material in the future also.
thanks
Andrew