Hi all,
I would like to dry etch crosslinked SU-8. Depth should be 1...3 microns.
Is there anybody who has got some experience with a process like this ?
We have a STS 320 PC RIE machine.
Any hint will be welcome.
Best regards
Peter
--
Vienna University of Technology
Institute of Sensor and Actuator Systems
Gusshausstrasse 27-29/366
A-1040 Vienna
Austria
Tel. +43-1-58801-36643
Fax +43-1-58801-36699