Hi, Patrick,
I saw your post about thin PDMS films on mems-talk. I am trying my first
time making such a thin PDMS film with through patterns, but faced some
problems. Do you mind sharing more info on how you made your stuff?
You mentioned that
"using a variable height silk screening squeege, parafilm wax sheets, metal
shim stocks, a very flat surface, tape, and industrial grade PDMS (RTV); the
PDMS was mixed 10:1 (standard mix ratio) and squeeged on the parafilm. The
cure time is ~ 24hrs room temp. Once the pdms cures on the parafilm it is
easily peeled off and ready for use. Using this technique I think the limit
is a PDMS film thickness of 25um, due to their fragility."
What kind of flat surface were you using? When to use parafilm wax
sheets? Do you have a more detailed protocol or receipe for this? Coz our
lab never used anything like silk screening squeege.
Any comments will be appreciated. Thank you very much.
--
Best Regards,
Shawn