Dear MEMS experts,
I have a Si wafer coated with a LPCVD silicon nitride thin film
200nm thick. I need to bond this silicon nitride coated wafer to
another Si wafer. Are there any good methods for bonding a silicon
nitride coated surface to another surface? I am flexible about the
surface coating of the second Si wafer.
If there exists such a bonding method, does it matter whether the
silicon nitride coating was deposted by LPCVD, PECVD or sputttering???
Thanks,
Richard Koba
Foster-Miller, Inc.
195 Bear Hill Road
Waltham, MA 02154-1196
781-684-4197
fax: 781-290-0693