Is there any way to etch a hole through on silicon
wafer?
Jeff chen
2006-04-03
Hi,
I am working on a project which needs to etch a hole through the
silicon wafer (525 micron thick). The hole diameter is around 50
micron.
Does anyone have experience to do that?
Is there any way to do that? Etching? Laser excimer? or grounding
technology?
Thanks a lot.
Best,
Jifeng