Hi,
I'm trying to patter a very thin silver film using photolithography. I am
having a few problems.
1. After developing S1811 in MF 321 (contains TMAH), I cannot seem to etch
silver in HNO3. Does TMAH react with Ag?
Can I just use TMAH to etch silver?
2. Is there a better way to etch silver than using HNO3? I've tried
I2:KI:H2O but I fear that this may be reacting with my PMMA layer which sits
between my silver layer and substrate.
Any advice would be appreciated.
Thanks,
Kevin