OK Mems people, work with me. This is a real question. How can I make a
silicon ramp 5um tall on one end and 1um on the other, 250um long, 5um
wide? I'm starting with a 5um layer of Si on a substrate. The real
question is how to etch/make a smooth, ramp, type structure. I feel a few
lith steps of 1um 4 times to build "stairs" and then figure a way to smooth
the 1um steps. Anyone????
Brent