Re: Looking for polymer films as etching mask against acid
Sangeeta N Bhatia
1998-03-26
Hi there-
I actually don't have an answer to your polymer film adhesion question,
but I have a question for you about parylene. Do you have any
good references on it. How are you depositing it? Any other tips
about it- I'm considering using it for some BioMEMs
work.
Thanks in advance
Sangeeta Bhatia, MD, PhD