Not knowing the details I am asuming that you have a 1 micon thick Pt layer
which you need to pattern.
If all fails may I suggest a lift of process works well with Pt and saves
money.
Regards
Walter
foundry@lume.com
----- Original Message -----
From: "Phillipe Tabada"
To:
Sent: Friday, July 07, 2006 11:44 AM
Subject: [mems-talk] Ion Mill Services
> Hi,
>
> Looking for a company who can ion mill 1 um of Pt using photoresist as
> a mask. Then remove the mask using wet etching (no ashing). This is for
> low volume research quantities.
>
> Phil