Dear Laurent,
Please refer to Nature Publishing group. A couple of months ago there was a
paper by a Japanese group to spin coat Si using solution and then devloping that
to get Si thin film of about 50 to 200 nm. They also made thin film transistor
out of Si thin film.
Good Luck...Pradeep Sharma.
On Thu, 20 Jul 2006 RABBIA Laurent wrote :
>Hello everybody,
>
>I would like to deposit silicone by spin coating in order to control the
>thickness of the layer. Has someone already done that ?