How high the resistivity of silicon should be to be
treated like an insulator?
Li Wang
2006-07-25
Dear Collegues,
When the comb drives are fabricated on a highly doped silicon and the voltage
and ground are applied on both plates, will the silicon be treated like a metal
so that the total capacitance will be increased? If we want to eleminate the
effects from the silicon substrate, how high the resistivity of silicon should
be so that it can be treated like an insulator?
Thanks
Li