Gary:
Can you provide some details about the plasma chamber you need? Size?
Ports? With some additional information there may be some help out
there in locating a chamber.
Best regards-
David
amron gary wrote:
>Hello all,
>
>I want build a chamber for Fluorine gas plasma. My
>questions are:
>
>1. Does someone has plasma chamber for Fluorine gas?
>2. Can someone on this forum help me in building this
>chamber?
>3. What gases can be used to create the plasma of
>flurorine? C2F2 or C2F4 or C2F6??? Thanks in advance..
>
>Gary amron