Dear all,
As I'm trying to establish several doping processes for p++ doping of
silicon wafers with boron I'm looking for some papers, suggestions and
experience reports.
The doping process will be carried out in a furnace with BN-Wafers as Boron
source.
The final aim is to create p++ doped membranes with an average thickness of
3-4microns.
Thank you for your help
Best regards,
Sebastian