Photoresist with smooth and high resolution sidewall
Hsiu-Jen Wang
2006-09-29
Yes, I'm looking for either positive or negative photoresist which has
very smooth and vertical sidewall. Both of these two are important to
my experiment because I'm investigating the sidewall quality to
fabricate microscale lens.
Alton Wang
University of Washington
On 9/29/06, Bill Moffat wrote:
> When you say high resolution are you looking for resist with vertical
> side walls?