Gold were elctroplating onto the edge of
photoresist
胡小东
2006-10-26
Dear All,
In the past two months, while we did gold elctroplating, there were two gold
"wings" extending from the gold line onto the edge of photoresist.
photoresist: AZ1500, 2.5 micron thick.
gold thickness: 2 micron
"wing" thickness: 3 to 4 micron
"wing" width: 10 to 20 micron
current density 5.5 mA/cm2
electoplating time 13min
PH value: 7
temperature: 50 degree
Has anyone experinced the same problem? May someone would give me any useful
suggextiongs. Thanks!
Huxiaodong