Do not ALL wet etches act isotropically?
Roger Brennan
Applications Director
Solecon Labs
770 Trademark Drive
Reno, NV 89521-5926
roger@Solecon.com
775-853-5900
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of bobhendu@aol.com
Sent: Tuesday, November 28, 2006 2:29 PM
To: mems-talk@memsnet.org
Subject: Re: [mems-talk] Anisotropic Wet Etching of Silicon nitride
Ed:
It would be much easier to plasma etch silicon nitride anisotropically. I
don't know of a masking material that would hold up to 180 degree C.
Phosphoric Acid bath. Bob Henderson
-----Original Message-----
From: ess26@runbox.com
To: mems-talk@memsnet.org
Sent: Tue, 28 Nov 2006 12:28 PM
Subject: [mems-talk] Anisotropic Wet Etching of Silicon nitride
Dear colleagues,
Does anybody knows a way how to ANISOTROPICALLY wet etch Silicon Nitride?