What is your ebeam resist? Generally you want to bake to remove
volatile solvents which could effect the patterning.
Seth B.
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of jpt sharma
Sent: Thursday, December 07, 2006 11:37 AM
To: General MEMS discussion
Subject: [mems-talk] E-beam lithography
HI all
Is there anyway to do ebeam lithography with out baking the e-beam
resist after spinning? OR baking at low temperaute <80 C