PZT can be etched using hydrofluoric acid (HF) (+ HCl+H2O)
________________________________
From: Dr Nicolas Felix [mailto:n.felix@vermon.com]
Sent: Sun 28/01/2007 22:27
To: mems-talk@memsnet.org
Subject: [mems-talk] best etching for PZT
I'm looking for dry or wet etching of PZT piezoceramics, do you have any
idea or references for this particular topic.
Regards
Nicolas