Which one have higher oxidation rate at Rm temp(Si(100)
or Polysilicon)
wanhong Cheung
2007-02-02
Dear Members,
Can any one tell me the oxidation rate of single-crystal silicon(100) have
higher or lower
oxidation rate then polysilicon at room temperature and why?
Because for my result the single-crystal silicon(100) have lower oxidation
rate then polysilicon,but the initial thickness the single-crystal silicon is
higher then the polysilicon.
So is that mean the single-crystal silicon(100) have higher oxidation rate at
room temperature.WHY?
Thanks
Jay