Does "un DRIE etching" refer to filling the hole that you previously etched?
-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of RABBIA Laurent
Sent: Monday, February 05, 2007 12:37 AM
To: 'mems-talk@memsnet.org'
Subject: [mems-talk] DRIE etching : how to enlarge the cavities
Hello everybody,
After un DRIE etching (Bosch process), I would like to enlarge the entry of
the cavities.
I heard about :
- HNO3/HF
- TMAH
- KOH
- different post-bake for photoresist
Has someone already done this ?
If yes, what's the process to follow ?