Hi, Sravya,
But sputtering give you tightly packed film. Thermal evaporated film is very
loose and grainy.
I wonder if sputtered Al film has better reflectivity?
-Andrew
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Sent: Monday, July 24, 2006 11:14 AM
Subject: [mems-talk] sputtering/Ebeam
> KSAW:
> I agree with Mr. Suraj Patil.
> Sputtering can be an economic proc=
> ess, but then not really reliable if you want a thin film. also the surf=
> aces are much cleaner and smoother if it is Ebeam.