Yue,
Just use H2O2. Warm to 50c.
Brent
Yue Mun Pun, Jeffrey wrote:
> Hi,
> I need to etch Titanium in my device using a safe wet etch chemistry. I
understand that HF is normally used to etch titanium films but this chemical is
too dangerous. Can anyone suggest a safer wet etch chemistry? Can I use
NH4OH:H2O2 chemistry to etch titanium?