Hi all,
   I am wondering if there is an easy way to make features higher than
50 um with a 10 um gap. I've tried su8 which can give thick resist in
one spin, but the gap didn't come out (using transparency mask). With
SPR or AZ resist, the gap can be made successfully, but it seems hard
to go higher than 50 um. I am wondering if anyone had similar
experience and any suggestion is gratefully acknoledged.
   Thanks a lot!

Best,
Liu Yu