I have thin layer of Silicon dioxide over sapphire wafer which I want to remove
off the wafer. I tried dipping in BOE/ HF but it is etching away sapphire too. I
was wondering what chemical do I use to remove just silicon oxide and no
sapphire.
Thanks,
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Nitin Shukla
PhD Candidate
Nanoscale Energy Transport Laboratory
Department of Mechanical Engineering
Virginia Tech
Blacksburg, VA 24061
Tel No: 540-231-5579