Hi,
I want to remove a thin layer of SiO2 (200 nm) from my sapphire wafer. I
tried using HF but it etches sapphire as well. Can anyone suggest me what
chemical do I use to remove oxide but not sapphire.
Thanks,
Nitin Shukla
PhD Candidate
Nanoscale Energy Transport Laboratory
Department of Mechanical Engineering
Virginia Tech
Blacksburg, VA 24061
Tel No: 540-231-5579