Using Chromium or Titanium thin film as a mask for Gold
wet etch
Yue Mun Pun, Jeffrey
2007-03-27
Hi,
I intend to pattern a layer of about 10nm of either
Chromium or Titanium via evaporation and lift-off on 200nm of Gold to etch away
the underlying gold film to create the same pattern as the Chromium or Titanium
patterns. I understand that there will be an undercut using wet etch
chemistries such as dilute Aqua Regia. However, I have also read that Chromium
has pinholes.
Has anyone done this process before and any idea how to resolve the pinhole
problem? Or is Titanium a better film to use?
Jeffrey