Hello All,
I am working with Chromium/Aluminum/Chromium coated quartz substrates and I
am trying to etch some organic residues sticking to the top chromium film. I
have seen in the literature that Piranha or RCA are recommended for organic
residue etching. I am wondering if these solutions are going to affect the
underlying metal films as well (which I definitely do not want to happen).
Please let me know if you have any suggestions.
Thanks,
Sreemanth