Alex-
Try dry etching using CF4 and/or SF6.
Charlie Whitman.
"Freeman, Alex" on 06/19/98
08:15:50 AM
Please respond to "Freeman, Alex"
; Please respond to
mems-cc%ISI.EDU@interlock.lexmark.com
To: MEMS%ISI.EDU@interlock.lexmark.com
cc: (bcc: Charles Whitman)
bcc: Charles Whitman
Subject: fast nitride etching
Dear MEMS Community,
Does anyone know how to etch nitride faster than is possible by hot
phosphoric acid? I am looking for etch rates of 50 - 100 A/sec.
~~~~~~~~~~~~~~~~~~~
Dr. Alex Freeman
Engineering Manager, Etch Group
Ball Semiconductor, Inc.
972-359-2442
afreeman@ballsemi.com
~~~~~~~~~~~~~~~~~~~