Etching of lead-magnesium-niobium-lead titanate (PMN-PT
film)
Rachel Tan
2007-04-24
Hi,
Has anyone worked with the etching (either dry or wet) of lead-magnesium-
niobium-lead titanate (PMN-PT) single crystal films? Is there any etching
process available to thin down a layer of PMNPT material?
Thanks for the help!
Rachel