Ren, we have coated 100 nm thick organic films, defect free 1 nm TIR
variability. The material is the viscosity of water. I would think that
if you used pmma thinned and cast a film of deep blue you would be very
close to having what you need.
-----Original Message-----
From: Ren Yang [SMTP:ren_yang@yahoo.com]
Sent: Thursday, May 03, 2007 1:44 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] 100nm coating for E-beam lith
Hi, All!
Is there any commerical E-beam resist can be coated to
100nm or even thinner?