HI....
I am working forward to build a MEMS based biosensor with 4 different
types of electrodes(Au) on a single Si wafer with each quarter(of the Si
wafer) occupying a different type of electrode .The 4 type of electrodes
,with their attributes ,are---
*Inter-digitated comb shaped electrodes(thickness,length,distance between
two legs etc.)
*Cirular spots(radius and no. of spots)
*zig-zag electrodes(angle,length of each leg,distance between different legs)
*Square-shaped spots(length of the side,no. of such spots)
to study the behaviour of biomolecules under different conditions.
I wanted help regarding the dimensions of the different electrodes as to
wht should be the the dimensions of the different attributes I've
mentioned above in the brackets.
If smbdy has done similar experiments,please help me out.I'm using a
2-inch Si wafer for my experiments(with PDMS or SU-8 layer).