linearization of voltage-angle relationship in a
torsional micromirror
Raj Gupta
2007-06-04
Matthew-
Electrode shaping has been used to linearize tip deflection of a cantilever to
voltage. This should be possible with torsional actuation. Alternatively,
design a nonlinear spring (one that stiffens with rotation). Google has a lot
of references.
Both approaches with likely increase the maximum voltage you'll need for full
rotation without making the structure overly compliant/fragile. The former
will be easier to micromachine compared to the latter. Both will require some
non-trivial analysis/simulation.
Good luck!
Raj
--- matthew king wrote:
> Hi,
>
> Is there any method to linearize the relationship
> between the voltage and rotation angle in a torsional
> micromirror? 3 degree rotation angle at most is OK.
>
> Any kind of help is appreciated.
>
> Best regards,
> Matthew King
--
Raj Gupta, PhD
http://terahz.org