Hi,
I am trying to make a structure that makes use of the difference in thermal
expansion of SU-8, PDMS and gold for actuation. The structure consists of a
cylinder of PDMS encased by a surrounding layer of SU-8. One end of these 2
layers will be covered by a thin film of gold (100nm), while the other end will
be heated up.
Does anyone have any experience in doing standard photolithography work on PDMS?
Jeffrey