I have hard time in depositing platinum.
I tried three different size e-beam evaporator but all deposition result in my
PMMA resist damage.
If resist continues damage, I should go with negative resist for EBL and need
to etch out the other area but I'm afraid whether I could get good resolution
(~10nm) with etching.
How did you resolve the heat problem? I tried to reduce the evaporation rate
but it seems not very helpful.
Thank you,
Sokwon Paik
Postdoctoral research associate
Oak Ridge National Laboratory