Dear Colleagues,
Has anybody done a study on the effect of heat
(conductive/convective/radiative) on gold-on-polysilicon bimorph
cantilevers formed by MUMPS process or any other surface
micromachined bimorph cantilevers.
Please suggest me any references on this topic.
Thanks,
Vamsee Krishna
Dept of Elec Engg'
Duke Univeristy
Durham, NC 27708