Hello Everyone,
I have a superlattice structure with following layers in the order:
Au
Cr
PECVD oxide (135 nm)
Si/SiGe SL (0.5 um)
SiGe/SiGeC buffer (1 um)
Si wafer
I want to remove Au, Cr and PECVD oxide layers. I was wondering if anyone could
suggest me on what etchants to use so that they selectively remove Au, Cr and
PECVD oxide layers but not the other layers.
Thanks,
Nitin Shukla
PhD Candidate
Nanoscale Energy Transport Laboratory
Department of Mechanical Engineering
Virginia Tech
Blacksburg, VA 24061
Tel No: 540-231-5579