Hello,
You can bond two glass wafers by annealing bonding at room temperature.
You do not need any intermediate layers to do that.
Paper: Sensors and Actuators B: Chemical Volume 119, Issue 1, 24
November 2006, Pages 335-344
Best Wishes,
Mamun Rashid
PhD Student
Centre for Nano & Microsystems
University of Teesside
TS1 3BA. U.K
www.mamun.info
+44(0)164 234 2428
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of P.E.M. Kuijpers
Sent: 20 August 2007 13:07
To: mems-talk@memsnet.org
Subject: [mems-talk] Glass to glass bonding
Hi all,
Is there a way to bond two glass wafers (Eagle glass ) directley to each
other without any intermediate layer??