Hello,
I am looking into obtaining literature on negative resist. I was
told that in the 70s, there was an active body of research pertaining to
negative resist studies. I am primarily interested in negative
cross-linking events (especially the accidental, non-intentional ones that
lead to residue). I appreciate any help. Thanks.
Ron Martin
BEI Systron Donner
QFAB Lithography Engineer
office: 925-671-6563