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MEMSnet Home: MEMS-Talk: HMDS For Adhesion
HMDS For Adhesion
2007-08-30
Richard B. Keithley
2007-08-30
Bill Moffat
HMDS For Adhesion
Richard B. Keithley
2007-08-30
Hey Y'all!

I want to use HDMS for adhesion of a DQ resist to my silicon substrate.
  I have looked in literature different groups use varying
concentrations of HDMS (ex:  10%, 20%, 100%).  I was wondering if
anyone had any personal experience they could share to help me out.

Thanks!

Richard B. Keithley
UNC Analytical Chemistry Graduate Student &
National Defense Science and Engineering Graduate Fellow
Wightman Research Group
Chapel Hill, NC 27599
919-962-1108
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