Colleagues,
The device I'm dealing with right now could be described as
follows
- 4 cantilevers are suspended (50umx150um) and fabricated on SIO
- The cantilevers are arranged at the edges of a square.
- The cantilevers are heated by electric current.
The problem I have for you is as follows
- I want to improve the deviation in resistance at room temperature
of the facing cantilevers.
- The deviation of the resistance at room temperature should be
smaller than 1%
- Also the deviation in thermal expansion (CTE) once the elements
are heated should be at least smaller than 2%
Does anyone have a suggestion which material might fit best in this case to
meet these requirements and also, are
there by any change new technologies (manufacturing) to keep the deviation
low?
Regards
Sebastian