One good method is to Excimer Laser drill. You can produce features as
small as 100um. Contact JPSA Laser, jpsalaser.com
-Michael
U. of Louisville
>>> "Yue Mun Pun, Jeffrey" 9/19/2007 12:28 AM
>>>
Hi,
I intend to etch through holes and/or cut glass cover slips. Can
anyone suggest methods to use? I was intending to use a Trion RIE
machine. What chemistry and etch rate is suitable? Can I pattern a
layer of Gold or Chromium (say 100nm thick) on the glass before etching
it?